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6674 Series - 316L SS Diaphragm Valves

Sherwood’s 6674 Series is used in corrosive gas applications, cylinder phosphine gas, atmospheric and purging gases,
dopant gases and reactant gases.

  • Crimped seat feature with anti-extrusion pin prevents seat extrusion and cold flow of the polymeric seat
  • Available in multiple seat material configurations to accommodate all high-purity gas applications
  • Increased flow (Cv) to aid in reducing vent and purge times
  • Low operating torque design ensures ease of operation during filling and use
  • Available with unitized pressure-relief device having fuse-metal backed or unbacked burst disc
  • Available with standard CGA connections as well as international inlets and outlets
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